Abstract: Cu2ZnSnS4 (CZTS) thin films were fabricated as the cathode layers for all-solid-state thin film lithium batteries (TFLB).The CZTS thin films were deposited by magnetic sputtering,followed by a sulfuration process.The electronic conductivity of CZTS was improved by the controlling of component and sulfuration process.Moreover,the capacity degeneration which is caused by volume expansion in charge-discharge process was inhibited by introducing a loose microstructure,leading to a improvement of the TFLB cyclic performance.The TFLB with a structure of glass/Mo/CZTS/LiPON/Li show the first cycle discharge capacity is as high as 200 μAh · cm-2 · μm-1 (482 mAh · g-1)with the discharge plant of1.1 V.

Key words: Cu2ZnSnS4 (CZTS) thin films were fabricated as the cathode layers for all-solid-state thin film lithium batteries (TFLB).The CZTS thin films were deposited by magnetic sputtering,followed by a sulfuration process.The electronic conductivity of CZTS was improved by the controlling of component and sulfuration process.Moreover,the capacity degeneration which is caused by volume expansion in charge-discharge process was inhibited by introducing a loose microstructure,leading to a improvement of the TFLB cyclic performance.The TFLB with a structure of glass/Mo/CZTS/LiPON/Li show the first cycle discharge capacity is as high as 200 μAh · cm-2 · μm-1 (482 mAh · g-1)with the discharge plant of1.1 V.