Large Area High Quality Diamond Films Deposition by 915 MHz High Power MPCVD Reactor

Welcome to Journal of Synthetic Crystals! Today is

E-mail Alert　

RSS

Share:

JOURNAL OF SYNTHETIC CRYSTALS ›› 2019, Vol. 48 ›› Issue (7): 1262-1267.

Previous Articles Next Articles

Large Area High Quality Diamond Films Deposition by 915 MHz High Power MPCVD Reactor

LI Yi-feng;TANG Wei-zhong;JIANG Long;GE Xin-gang;ZHANG Ya-lin;AN Xiao-ming;LIU Xiao-chen;HE Qi-yu;ZHANG Ping-wei;GUO Hui;SUN Zhen-lu

Online:2019-07-15 Published:2021-01-20

Abstract

CLC Number:

TB34

LI Yi-feng;TANG Wei-zhong;JIANG Long;GE Xin-gang;ZHANG Ya-lin;AN Xiao-ming;LIU Xiao-chen;HE Qi-yu;ZHANG Ping-wei;GUO Hui;SUN Zhen-lu. Large Area High Quality Diamond Films Deposition by 915 MHz High Power MPCVD Reactor[J]. Journal of Synthetic Crystals, 2019, 48(7): 1262-1267.

[1]	DING Jiafu, HE Zhihao, WANG Yunjie, SU Xin. First-Principles Study on the Regulation of Optical Properties of Gallium, Indium, and Thallium Phosphates Through Sulfur Substitution [J]. JOURNAL OF SYNTHETIC CRYSTALS, 2025, 54(1): 95-106.
[2]	ZHAO Wenhai, TAO Shixu, TONG Siyi, TANG Jian, ZUO Chuandong, CAO Yongge, MA Chaoyang. Research Progress on Lu₂O₃ Based Laser Transparent Ceramics [J]. JOURNAL OF SYNTHETIC CRYSTALS, 2024, 53(12): 2043-2058.
[3]	NIU Lili, WANG Pei, LIU Yanbin, ZHAO Huijuan. Recent Advances in Biomass-Derived Carbon Materials for Supercapacitors [J]. JOURNAL OF SYNTHETIC CRYSTALS, 2024, 53(8): 1302-1312.
[4]	SUN Yuanlong, HU Ziyu, ZHENG Guozong. Growth and Photoelectric Properties Characterization of Large-Sized CH₃NH₃PbBr₃ Crystal [J]. JOURNAL OF SYNTHETIC CRYSTALS, 2024, 53(8): 1313-1318.
[5]	LIU Xiaoying, HUANG Haishen, SUN Li, PAN Mengmei, SHANG Zhenzhen. First-Principles Study on the Electronic and Magnetic Properties of MXene 2D Material CrVCF₂ [J]. JOURNAL OF SYNTHETIC CRYSTALS, 2024, 53(8): 1386-1393.
[6]	DING Tao, LI Qingwen, XU Yuqi, ZHONG Min. Research Progress and Prospect of Chalcogenide Perovskite of BaZrS₃ and Its Preparation [J]. JOURNAL OF SYNTHETIC CRYSTALS, 2024, 53(6): 922-929.
[7]	LI Yuqi, XU Ying, LIANG Shiming. Research Progress of Indium Oxide-Based Gas Sensitive Materials [J]. JOURNAL OF SYNTHETIC CRYSTALS, 2024, 53(6): 930-946.
[8]	ZHANG Bo, WANG Yunjie, QI Yajie, DING Jiafu, HE Zhihao, SU Xin. First Principles Study on the Structure-Property Relationship of Alkali Metal Molybdates [J]. JOURNAL OF SYNTHETIC CRYSTALS, 2024, 53(6): 999-1007.
[9]	WANG Leilei, YIN Zhenhua, ZHANG Yunke, LIU Lei, CHEN Ming. First-Principles Study of Lead-Free Quaternary Thioiodides with Outstanding Optoelectronic Properties for Solar Cells [J]. JOURNAL OF SYNTHETIC CRYSTALS, 2024, 53(5): 803-809.
[10]	ZHANG Jiahao, WANG Dexiu, LI Yuqi, XU Ying, LIANG Shiming, SONG Xuesheng. Research Progress on the Preparation Method and Application of Molybdenum Disulfide Nanomaterials [J]. JOURNAL OF SYNTHETIC CRYSTALS, 2024, 53(4): 600-619.
[11]	WANG Chenxing, LIU Yusong, HU Yongchi, HU Jiajun, ZHAO Yuchun, SONG Xuhui, SONG Yanyan. Effect of Carbonization Temperature on Electrocatalytic Oxidation Methanol Performance of CF/Pd Catalysts [J]. JOURNAL OF SYNTHETIC CRYSTALS, 2024, 53(4): 721-729.
[12]	XIE Hanrong, YANG Tiefeng, WEI Yuming, GUAN Heyuan, LU Huihui. Recent Research Progress of Thin film Lithium Niobate Photodetector [J]. JOURNAL OF SYNTHETIC CRYSTALS, 2024, 53(3): 410-425.
[13]	ZHANG Feipeng, LU Qingmei, LIU Weiqiang, ZHANG Dongtao, YUE Ming. Study on Electronic Structure and Magnetic Property of MnGa Binary Alloy under Isostatic Pressure [J]. JOURNAL OF SYNTHETIC CRYSTALS, 2024, 53(3): 541-550.
[14]	LI Hong, LIAO Xin, HOU Jing, XU Zhong. Interface Defects of Perovskite Solar Cells and Their Suppression Methods [J]. JOURNAL OF SYNTHETIC CRYSTALS, 2024, 53(1): 38-50.
[15]	WANG Zhaopeng, ZENG Jin, GAO Yan, WANG Chunying. Research Progress on Rare Earth Up-Conversion Photocatalysts [J]. JOURNAL OF SYNTHETIC CRYSTALS, 2024, 53(1): 51-57.

Large Area High Quality Diamond Films Deposition by 915 MHz High Power MPCVD Reactor

PDF (PC)

Knowledge

Abstract

Cite this article

share this article

References

Related Articles 15

Recommended Articles

Metrics

Comments