Acquirement and Significance Analysis of No Gallium and No Aluminum Environment of MOCVD Reactor

JOURNAL OF SYNTHETIC CRYSTALS ›› 2019, Vol. 48 ›› Issue (11): 2032-2037.

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Acquirement and Significance Analysis of No Gallium and No Aluminum Environment of MOCVD Reactor

YANG Chao-pu;FANG Wen-qing;LIU Ming-bao;MAO Qing-hua;YANG Fan

Online:2019-11-15 Published:2021-01-20

Abstract

CLC Number:

O782+.7
TN16

YANG Chao-pu;FANG Wen-qing;LIU Ming-bao;MAO Qing-hua;YANG Fan. Acquirement and Significance Analysis of No Gallium and No Aluminum Environment of MOCVD Reactor[J]. Journal of Synthetic Crystals, 2019, 48(11): 2032-2037.

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Acquirement and Significance Analysis of No Gallium and No Aluminum Environment of MOCVD Reactor

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