Fabrication and Characterization of AlN Thin Films on Stainless Steel Substrates by RF Magnetron Sputtering

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JOURNAL OF SYNTHETIC CRYSTALS ›› 2019, Vol. 48 ›› Issue (12): 2201-2206.

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Fabrication and Characterization of AlN Thin Films on Stainless Steel Substrates by RF Magnetron Sputtering

FAN Zhi-qin;CHEN Fei-yue

Online:2019-12-15 Published:2021-01-20

Abstract

CLC Number:

TB383

FAN Zhi-qin;CHEN Fei-yue. Fabrication and Characterization of AlN Thin Films on Stainless Steel Substrates by RF Magnetron Sputtering[J]. Journal of Synthetic Crystals, 2019, 48(12): 2201-2206.

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Fabrication and Characterization of AlN Thin Films on Stainless Steel Substrates by RF Magnetron Sputtering

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