Research on Surround Coating Removal Technology for Polysilicon

JOURNAL OF SYNTHETIC CRYSTALS ›› 2020, Vol. 49 ›› Issue (9): 1641-1645.

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Research on Surround Coating Removal Technology for Polysilicon

ZHANG Ting;LIU Dawei;SONG Zhicheng;NI Yufeng;YANG Lu;LIU Junbao

Online:2020-09-15 Published:2021-01-20

Abstract

CLC Number:

TM914.4+1

ZHANG Ting;LIU Dawei;SONG Zhicheng;NI Yufeng;YANG Lu;LIU Junbao. Research on Surround Coating Removal Technology for Polysilicon[J]. Journal of Synthetic Crystals, 2020, 49(9): 1641-1645.

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Research on Surround Coating Removal Technology for Polysilicon

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