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JOURNAL OF SYNTHETIC CRYSTALS ›› 2020, Vol. 49 ›› Issue (10): 1896-1903.
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WANG Xinyang;CAO Guangyu;HUANG Chong
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RSSOnline:2020-10-15
Published:2021-01-20
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WANG Xinyang;CAO Guangyu;HUANG Chong. Simulation Optimization and Verification of a Microwave System for Microwave Plasma Chemical Vapor Deposition Device[J]. Journal of Synthetic Crystals, 2020, 49(10): 1896-1903.
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