Influence of Workpiece Position on Film Deposition Rate

JOURNAL OF SYNTHETIC CRYSTALS ›› 2018, Vol. 47 ›› Issue (5): 1030-1035.

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Influence of Workpiece Position on Film Deposition Rate

ZHENG Jin-hua;XU Lu;FAN Zhong-lei;MA Xin-ling

Online:2018-05-15 Published:2021-01-20

Abstract

CLC Number:

O484.2

ZHENG Jin-hua;XU Lu;FAN Zhong-lei;MA Xin-ling. Influence of Workpiece Position on Film Deposition Rate[J]. Journal of Synthetic Crystals, 2018, 47(5): 1030-1035.

Influence of Workpiece Position on Film Deposition Rate

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