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JOURNAL OF SYNTHETIC CRYSTALS ›› 2018, Vol. 47 ›› Issue (6): 1197-1203.
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LIU Jing-jing;YAO Yao;ZHU Yue-ling;DAI Wei;XIAO Shao-qing;GU Xiao-feng
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RSSOnline:2018-06-15
Published:2021-01-20
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LIU Jing-jing;YAO Yao;ZHU Yue-ling;DAI Wei;XIAO Shao-qing;GU Xiao-feng. Preparation and Passivation Study on Amorphous Silicon Thin-films Based on Soft Plasma Chemical Vapor Deposition[J]. Journal of Synthetic Crystals, 2018, 47(6): 1197-1203.
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