Effect of N2 Flow Rate on Microstructure and Corrosion Resistance of Pulse Sputtering CrNx Thin Films

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JOURNAL OF SYNTHETIC CRYSTALS ›› 2018, Vol. 47 ›› Issue (12): 2599-2603.

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Effect of N2 Flow Rate on Microstructure and Corrosion Resistance of Pulse Sputtering CrNx Thin Films

LU Yuan-yuan;DING Xu;LUO Jia-wen;WU Kun-yao

Online:2018-12-15 Published:2021-01-20

Abstract

CLC Number:

TG17

LU Yuan-yuan;DING Xu;LUO Jia-wen;WU Kun-yao. Effect of N2 Flow Rate on Microstructure and Corrosion Resistance of Pulse Sputtering CrNx Thin Films[J]. Journal of Synthetic Crystals, 2018, 47(12): 2599-2603.

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Effect of N2 Flow Rate on Microstructure and Corrosion Resistance of Pulse Sputtering CrNx Thin Films

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