Structure and Transparent Conductive Properties of (Ti/ZnO)N Compositionally Modulated Nano Multilayer Films

Abstract

Abstract: Using radio frequency (RF) and unipolar medium frequency direct-current (DC) pulsed magnetron sputtering methods, (Ti/ZnO)_N compositionally modulated nano multilayer films were prepared on the glass substrate, the effects of number of modulation cycles on the the structure and transparent conductive properties of the films were investigated. The results of X-ray diffraction, Raman spectroscopy, atomic force microscopy, ultraviolet-visible transparent spectroscopy and Hall effect show that the prepared (Ti/ZnO)_N compositionally modulated nano-multilayer films have hexagonal wurtzite structure of ZnO with preferred (002) orientation, and clear compositionally modulated nano-multilayer structure, in which the Ti and ZnO layers are flat, continuous and with uniform thickness, while the interface is clean and without diffusion. The average optical transmittance in the visible range is higher than 85% while the minimum resistivity is at about 2.63×10^-2 Ω·cm.

Key words: magnetron sputtering, (Ti/ZnO)_N, number of modulation cycle, light transmittance, electrical property

CLC Number:

TB383.2

NIU Ben, WU Jun, WANG Kaifeng, HUANG Chengbin, FU Hao, ZHU Bolin, LI Taotao, YAO Yagang. Structure and Transparent Conductive Properties of (Ti/ZnO)_N Compositionally Modulated Nano Multilayer Films[J]. Journal of Synthetic Crystals, 2021, 50(8): 1478-1484.

References

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Structure and Transparent Conductive Properties of (Ti/ZnO)_N Compositionally Modulated Nano Multilayer Films

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