Progress of Chemical Vapor Deposition (CVD) Diamond

Abstract

Abstract: Chemical vapor deposition (CVD) technology has enabled synthetic diamonds to be applied in many fields, in which the excellent comprehensiveness of diamond has been fully developed, and may lead to a leap-forward development. The color center makes the diamond quantum accelerator initially show the feasibility of great power. Various scenarios, including the application of UV laser writing technology windows, maximize the comprehensive advantages of diamond windows in terms of optics, electricity, heat and mechanics. Ultra-wide bandgap diamond semiconductor applications will soon be realized, and diamond heat dissipation applications are constantly expanding. By summarizing the preparation methods and characteristics of CVD diamond, according to the intrinsic characteristics of diamond, CVD diamond is classified into quantum grade, electronic grade, optical grade, thermal grade and mechanical grade. The current status of research and application of CVD diamond are reviewed in detail, which is of great significance for judging the future development trend of CVD diamond.

Key words: chemical vapor deposition, diamond, color center, ultra-wide bandgap, heat dissipation, superhard material

CLC Number:

TQ163

LI Chengming, REN Feitong, SHAO Siwu, MU Lianxi, ZHANG Qinrui, HE Jian, ZHENG Yuting, LIU Jinlong, WEI Junjun, CHEN Liangxian, LYU Fanxiu. Progress of Chemical Vapor Deposition (CVD) Diamond[J]. Journal of Synthetic Crystals, 2022, 51(5): 759-780.

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