High Performance Zn Diffused Mg Doped LN Crystal Ridge Waveguide Devices

Abstract

Abstract: The waveguide structure made of lithium niobate crystal (LiNbO₃, LN) can further improve the device integration. It has been widely used in electro-optical modulator, frequency conversion, acousto-optic Q-switching and other optoelectronic devices. It has important application prospects in optical fiber communication, photoelectric sensing, lidar, aerospace and other fields. The LN waveguide made by traditional Ti diffusion method has poor resistance to photorefractive damage in short wave applications. The LN waveguide made by annealing proton exchange method only support TM mode (transverse magnetic mode) single polarization transmission, and its application field is limited. In this paper, a new Zn diffusion method is proposed to fabricate magnesium doped LN ridge waveguide. By establishing the diffusion model and simulation of the waveguide, the technological conditions were explored and tested. The lowest transmission loss of LN waveguide is 0.86 dB/cm, and the photorefractive damage threshold can reach 184 kW/cm². It will provide a better preparation way for the research and development of high power lithium niobate waveguide integrated optoelectronic devices.

Key words: Mg doped lithium niobate crystal, optical waveguide, waveguide device, Zn diffusion, high power density, transmission loss

CLC Number:

O734

CHEN Zhongyu, CHENG Jingxin, CHEN Huaixi, FENG Xinkai, ZHANG Xinbin, LIANG Wanguo. High Performance Zn Diffused Mg Doped LN Crystal Ridge Waveguide Devices[J]. Journal of Synthetic Crystals, 2022, 51(11): 1823-1829.

References

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