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Effect of C/Si Ratio on SiC Fast Homoepitaxial Growth in Vertical Hot-Wall CVD Reactor
CHEN Danying, YAN Long, LUO Jiahao, ZHENG Zhenyu, JIANG Yong, ZHANG Kai, ZHOU Ning, LIAO Chenzi, GUO Shiping
Journal of Synthetic Crystals . 2025, (4): 569 -580 .  DOI: 10.16553/j.cnki.issn1000-985x.2024.0247