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人工晶体学报 ›› 2001, Vol. 30 ›› Issue (1): 99-104.

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电子辐照对VO2薄膜热致相变过程中光学性能的影响

卢勇;林理彬;邹萍;何捷;卢铁城   

  1. 四川大学物理系,;四川大学分析测试中心,
  • 出版日期:2001-01-15 发布日期:2021-01-20

Optical Transmittance Properties of VO2 Thermochromatic Thin Films Affected by Electron Irradiation

LU Yong;LIN Li-bin;ZOU Pin;HE Jie;LU Tie-cheng   

  • Online:2001-01-15 Published:2021-01-20

摘要: 利用能量为1.7MeV,注量分别为1013~1015/cm2的电子束辐照二氧化钒薄膜,对辐照及未辐照样品进行了UV-VIS、XPS参数测试,并测量900nm处光透射性能随温度的变化。发现电子辐照导致了VO2薄膜中的V离子价态由V4+向V5+转变,薄膜热致相变前后的光透射比随注量增加变化较小,只在注量为1014/cm2时光透射比减小得较明显;相变温度点及热滞回线宽度随注量增加出现显著变化。并对有关的结果进行了讨论。

关键词: 电子辐照;光透射性能;VO2薄膜

Abstract: VO2 thermochromatic thin films have been irradiated by electron beam with energy of 1.7MeV and flux from 1013/cm2 to 1015/cm2 .Un-irradiated and irradiated samples have been characterized by XPS and UV-VIS analysis.At the same time,the hysteresis characteristics of light changing with temperature at 900nm have been studied.The results show that a part of V4+ions change into V5+ after irradiated by electron beam and the transmittance properties have obvious variation before and after irradiation.The maximum change of transmittance during phase transition process is the sample irradiated by 1014/cm2 electron beam.The change of optical transmittance properties have been discussed .

Key words: VO2 thermochromatic thin films have been irradiated by electron beam with energy of 1.7MeV and flux from 1013/cm2 to 1015/cm2 .Un-irradiated and irradiated samples have been characterized by XPS and UV-VIS analysis.At the same time,the hysteresis characteristics of light changing with temperature at 900nm have been studied.The results show that a part of V4+ions change into V5+ after irradiated by electron beam and the transmittance properties have obvious variation before and after irradiation.The maximum change of transmittance during phase transition process is the sample irradiated by 1014/cm2 electron beam.The change of optical transmittance properties have been discussed .

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