关键词: 光波导;椭圆偏振测量;离子注入;折射率

Abstract: 2.5 MeV B ion-implanted lithium niobate crystal was studied by ellipsometry method. Data from the measurement were inversed to fit a moderate four-layer model for the crystal. The depth of waveguide layer and the refractive index dispersion in the range of 0.3-0.8 μm were obtained. Barrier of reduced refractive index was found .Waveguide structure was get from the crystal surface to the depth of 2.0 μm in the crystal. The results provided important information for the fabrication of waveguide devices.

Key words: 2.5 MeV B ion-implanted lithium niobate crystal was studied by ellipsometry method. Data from the measurement were inversed to fit a moderate four-layer model for the crystal. The depth of waveguide layer and the refractive index dispersion in the range of 0.3-0.8 μm were obtained. Barrier of reduced refractive index was found .Waveguide structure was get from the crystal surface to the depth of 2.0 μm in the crystal. The results provided important information for the fabrication of waveguide devices.