关键词: 硅纳米孔柱阵列;模板;选择沉积;金纳米复合薄膜

Abstract: The Au/Si-NPA samples with different morphologies were fabricated experimentally by immersion technique using fresh and aged silicon nanoporous pillar array (Si-NPA)substrates as template. The results show that the differences between morphologies of the Au/Si-NPAs which were prepared on two kinds of substrates are due to the differences of oxygen quantities distributing on the surface of the Si-NPA substrates. The further studies show that the Si-NPA present two functionalities during fabricating of the Au/Si-NPA. One is as the reductant and another the template. The Si-NPA regular array structure leads to the velocity dependence of Au deposition on the local geometrical features of the Si-NPA surface. Finally, the quasi-periodical, regular Au nanocomposite thin film has been formed.

Key words: The Au/Si-NPA samples with different morphologies were fabricated experimentally by immersion technique using fresh and aged silicon nanoporous pillar array (Si-NPA)substrates as template. The results show that the differences between morphologies of the Au/Si-NPAs which were prepared on two kinds of substrates are due to the differences of oxygen quantities distributing on the surface of the Si-NPA substrates. The further studies show that the Si-NPA present two functionalities during fabricating of the Au/Si-NPA. One is as the reductant and another the template. The Si-NPA regular array structure leads to the velocity dependence of Au deposition on the local geometrical features of the Si-NPA surface. Finally, the quasi-periodical, regular Au nanocomposite thin film has been formed.