关键词: 磁控反应共溅射;CeOx-SnOx薄膜;氩氧流量比;紫外截止

Abstract: CeOx-SnOx thin film were grown on glass via a magnetron co-sputtering process based on cerium and tin target.The structure, morphology and composition of CeOx-SnOx thin film were characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM), Transmission electron microscopy (TEM) and X-ray photoelectron spectroscopy (XPS).The results show that the film grows in island mode.The crystallinity of thin films is enhanced, the occurrence of CeO2 and SnO, with the decreasing of the Ar/O2 flow ratio.In addition, the optical properties of the film was investigated by UV-visible spectroscopy.The investigation indicate that the film reveal a strong UV absorption.The average transmittance of visible is 81.48;, and the transmittance of UV is only 5.80; when the Ar/O2 flow ratio is 3∶1.

Key words: CeOx-SnOx thin film were grown on glass via a magnetron co-sputtering process based on cerium and tin target.The structure, morphology and composition of CeOx-SnOx thin film were characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM), Transmission electron microscopy (TEM) and X-ray photoelectron spectroscopy (XPS).The results show that the film grows in island mode.The crystallinity of thin films is enhanced, the occurrence of CeO2 and SnO, with the decreasing of the Ar/O2 flow ratio.In addition, the optical properties of the film was investigated by UV-visible spectroscopy.The investigation indicate that the film reveal a strong UV absorption.The average transmittance of visible is 81.48;, and the transmittance of UV is only 5.80; when the Ar/O2 flow ratio is 3∶1.