关键词: 多周期;磁控溅射;铜锌锡硫(CZTS);薄膜太阳电池

Abstract: CZTS thin film solar cells were fabricated by magnetron sputtering multi-period Cu-Sn-Zn precursors.Multi-period includes double periods and four periods, meanwhile multi-period compared with CZTS thin films prepared by single period.The crystal structure, morphology, chemical composition and phase purity of CZTS thin film prepared by different periods were characterized by X Ray Diffraction(XRD), scanning electron microscopy(SEM) equipped with an energy dispersive spectrometer(EDS) and Raman spectroscopy.The results reveal that the crystal quality of CZTS thin film prepared by multi-period is better than that of single period, especially having uniform and compact surface.The most important is that the CZTS thin films prepared by four periods sputtering are the better experiment group in this paper.Finally, complete device structures were fabricated using CZTS thin film with different sputtering periods, and 2.64; efficiency of CZTS by single period, 3.01; efficiency by double periods and 3.36; efficiency by four periods were obtained, respectively.

Key words: CZTS thin film solar cells were fabricated by magnetron sputtering multi-period Cu-Sn-Zn precursors.Multi-period includes double periods and four periods, meanwhile multi-period compared with CZTS thin films prepared by single period.The crystal structure, morphology, chemical composition and phase purity of CZTS thin film prepared by different periods were characterized by X Ray Diffraction(XRD), scanning electron microscopy(SEM) equipped with an energy dispersive spectrometer(EDS) and Raman spectroscopy.The results reveal that the crystal quality of CZTS thin film prepared by multi-period is better than that of single period, especially having uniform and compact surface.The most important is that the CZTS thin films prepared by four periods sputtering are the better experiment group in this paper.Finally, complete device structures were fabricated using CZTS thin film with different sputtering periods, and 2.64; efficiency of CZTS by single period, 3.01; efficiency by double periods and 3.36; efficiency by four periods were obtained, respectively.