关键词: 石墨烯;化学气相沉积;褶皱;刻蚀

Abstract: Hexagonal graphene domains were synthesized on polished Cu substrate by chemical vapor deposition(CVD), and were etched with oxygen.After etching, reticular and short-line trenches were observed on the graphene domains as the result of etching on the wrinkles, and the density of trenches has great difference.The morphology and density of wrinkles were closely associated with the Cu crystal orientation indicated by the electron back-scattered diffraction.A different Cu crystal orientation led to variations in the morphology and density of wrinkles.The etching temperature has greater influence on the oxygen etching of graphene, and the etching rate increased obviously when the etching temperature exceed 250 ℃.The simple oxygen etching technology might be a convenient way to detect the distribution and morphology of wrinkles.

Key words: Hexagonal graphene domains were synthesized on polished Cu substrate by chemical vapor deposition(CVD), and were etched with oxygen.After etching, reticular and short-line trenches were observed on the graphene domains as the result of etching on the wrinkles, and the density of trenches has great difference.The morphology and density of wrinkles were closely associated with the Cu crystal orientation indicated by the electron back-scattered diffraction.A different Cu crystal orientation led to variations in the morphology and density of wrinkles.The etching temperature has greater influence on the oxygen etching of graphene, and the etching rate increased obviously when the etching temperature exceed 250 ℃.The simple oxygen etching technology might be a convenient way to detect the distribution and morphology of wrinkles.