衬底用单晶金刚石晶格随温度变化的研究

摘要/Abstract

摘要： 本文对CVD(Chemical Vapour Deposition, CVD)外延生长中作为衬底的高温高压(HTHP)单晶金刚石进行拉曼光谱测试,利用谱峰半高宽(FWHM)判断了衬底的结晶质量。开展了升温(室温~1 000 ℃)和降温(1 000 ℃~室温)过程中衬底晶格变化的X射线原位测量研究。实验表明:衬底的晶格常数随温度变化而变化,在1 000 ℃时因晶格变化而产生的应力大小为GPa量级。晶格常数在降温过程要比升温过程的数值大,线膨胀系数的计算结果也发现了相同的现象。根据傅里叶红外光谱仪(FT-IR)测试结果推断:造成上述变温过程中晶格变化差异的原因在于样品中氮浓度的不同,其中氮浓度越高,拉曼光谱的半高宽越大,衬底的晶格常数变化越大,线膨胀系数越大。

关键词: 单晶金刚石, 衬底, 晶格常数, 膨胀系数, 氮浓度, FT-IR, 拉曼光谱

Abstract: The Raman spectrum test was performed on the high temperature and high pressure (HTHP) single crystal diamond as the candidates of the substrates in the CVD(Chemical Vapour Deposition, CVD) epitaxial growth, and the crystalline quality of the substrates was judged by the full width at half maximum (FWHM) of the peak. X-ray in-situ measurement study of the substrate lattice changes during the heating (room temperature to 1 000 ℃) and cooling (1 000 ℃ to room temperature) processes. Experiments show that the lattice constant of the substrate changes with temperature, and the stress caused by the lattice change at 1 000 ℃ is close to the GPa level. The lattice constant is larger in the cooling process than in the heating process, and the same phenomenon is found in the calculation result of the linear expansion coefficient. According to the FT-IR test results of the tested sample, it is inferred that the reason for the variant above-mentioned lattice change is the difference in nitrogen content in the sample. The higher the nitrogen content, the larger the FWHM of the Raman spectrum, and the lattice constant of substrate more obvious changes with temperature, the larger the linear expansion coefficient.

Key words: single crystal diamond, substrate, lattice constant, nitrogen concentration, expansion coefficient, FT-IR, Raman spectrum

中图分类号:

TQ163

陈正佳, 徐锴, 陈广超. 衬底用单晶金刚石晶格随温度变化的研究[J]. 人工晶体学报, 2021, 50(1): 25-31.

CHEN Zhengjia, XU Kai, CHEN Guangchao. Temperature-Depending Variation of Lattice of Single Crystal Diamond as Substrate[J]. JOURNAL OF SYNTHETIC CRYSTALS, 2021, 50(1): 25-31.

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