基于激光诱导向前转移技术的微纳结构制备研究现状

摘要/Abstract

摘要： 激光直写技术(LDW)是当前数字化微纳加工的主要技术之一,其中喷墨打印技术以其分辨率高和控制灵活等优点被广泛应用。随着功能化材料的不断出现和越来越多的应用需求,喷墨打印技术对墨汁的严格要求限制了它在某些领域的应用。激光诱导向前转移(LIFT)技术无须模板和喷嘴,打印分辨率高,且不受墨汁流变性质的限制。该技术的材料适用范围广,几乎可以打印各种固体和液体材料,已被广泛应用于电子器件、传感器以及再生医学的组织工程等相关领域。本文系统阐述了LIFT技术制备微纳结构的研究现状,并对LIFT技术的应用及其物理过程的研究进展进行了系统地归纳与总结,研究结果将对LIFT技术在微纳加工领域的进一步应用提供重要参考价值。

关键词: 激光诱导向前转移, 激光直写技术, 微纳加工, 相变转移, 无相变转移

Abstract: Laser direct writing(LDW) technology is one of the popular technologies in digital micro-nano machining, in which ink-jet printing technology has been widely used for its high resolution and flexibility. With more appearance of the functional materials and application requirements, the strict choice of ink-jet printing technology to the ink limits its application in some fields. Laser-induced forward transfer (LIFT) technology does not require templates and nozzles. The micro- and nano- structure printed by LIFT has high resolution, and will not be limited by the rheological properties of ink. It is appropriate to print various materials with nearly all the solids and liquids, and has be widely used in electronics, sensors, and tissue engineering in regenerative medicine. In this paper, the research progress of the LIFT has been reviewed, the physical process and application of LIFT technology have been summarizes, which will provide the reference for the further research of LIFT technology in the field of micro-nano machining.

Key words: laser induced forward transfer, laser direct writing, micro-nano machining, transfer with phase change, transfer without phase change

中图分类号:

TG665

申惠娟, 翁占坤, 陈星源, 邓锂强, 韩太坤, 祁玲敏, 赖国霞, 宁土荣, 马黎政. 基于激光诱导向前转移技术的微纳结构制备研究现状[J]. 人工晶体学报, 2021, 50(1): 179-186.

SHEN Huijuan, WENG Zhankun, CHEN Xingyuan, DENG Liqiang, HAN Taikun, QI Lingmin, LAI Guoxia, NING Turong, MA Lizheng. Preparation of Micro-Nano Structure Based on Laser Induced Forward Transfer Technique[J]. JOURNAL OF SYNTHETIC CRYSTALS, 2021, 50(1): 179-186.

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