LPE生长GaN的不同极性面的光学性质

人工晶体学报 ›› 2021, Vol. 50 ›› Issue (6): 996-1001.

LPE生长GaN的不同极性面的光学性质

任玉娇^1,2, 刘宗亮², 顾泓², 董晓鸣², 高晓东², 司志伟^2,3, 徐科^1,2

1.中国科学技术大学纳米技术与纳米仿生学院,合肥 230026;
2.中国科学院苏州纳米技术与纳米仿生研究所,苏州 215000;
3.中国科学技术大学纳米科学技术学院,苏州 215000

收稿日期:2021-04-20 出版日期:2021-06-15 发布日期:2021-07-08
通讯作者: 刘宗亮,博士。E-mail:zlliu2006@sinano.ac.cn;徐科,博士,研究员。E-mail:kexu2006@sinano.ac.cn
作者简介:任玉娇(1995—),女,山东省人,硕士研究生。E-mail:yjren2019@sinano.ac.cn
基金资助:
国家重点研发计划(2017YFB0404100)

Optical Properties of LPE-GaN Grown in Different Polar Directions

REN Yujiao^1,2, LIU Zongliang², GU Hong², DONG Xiaoming², GAO Xiaodong², SI Zhiwei^2,3, XU Ke^1,2

1. School of Nano Technology and Nano Bionics, University of Science and Technology of China, Hefei 230026, China;
2. Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences, Suzhou 215000, China;
3. China Nano Science and Technology Institute, University of Science and Technology of China, Suzhou 215000, China

Received:2021-04-20 Online:2021-06-15 Published:2021-07-08

摘要/Abstract

摘要： 极化效应会导致GaN基发光器件的效率降低,因此关于非极性和半极性GaN单晶的研究受到了广泛关注。为了进一步探究不同极性GaN的发光特性和杂质掺入的内在机理,本文利用钠助熔剂法侧向生长出的不同极性面的GaN单晶作为研究对象,对比了不同极性面的光学性质及杂质掺入特点,讨论了黄光带(YL)峰的起源及其影响因素。首先利用阴极荧光(CL)、光致发光(PL)对液相外延(LPE)法生长的不同极性方向的GaN的光学性质进行了研究。结果表明,不同的生长极性面会显露出不同的光学特性。朝着侧向生长的 [1122] 和 [1120] GaN的CL和PL特性相似,但与 [0001] GaN的光谱有较大差异。PL杂质峰包含两个肩峰peak 1(2.2 eV)和peak 2 (2.6 eV),在不同极性面中强度占比各不相同,推测分别与C_NO_N和C_N缺陷的0/+能级的跃迁有关。通过SIMS元素分析,C元素分布较为均匀,O元素分布存在较大差异,在[1122]区域沿着生长方向O含量逐渐增加,结合PL中2.2 eV处峰的强度增加,进一步证明了2.2 eV处的峰强与O含量存在正相关性。

关键词: 氮化镓, 钠助熔剂, 液相外延, 光致发光, 黄光带, 氧杂质, 极性

Abstract: The polarization effect in gallium nitride (GaN) will reduce the efficiency of light-emitting diodes (LEDs), so the research on non-polar and semi-polar bulk GaN has received extensive attention. The purpose of our research is to optimize the growth of bulk GaN by exploring the luminescence characteristics between different polar directions of GaN and the fundamental mechanism of impurity doping. In this paper, the bulk GaN single crystals with different polar directions grown laterally by the Na-flux method are used as the research object. The optical properties and impurity distribution characteristics of bulk GaN with different polar directions were compared, and the origin of yellow luminescence (YL) band of bulk GaN and its influencing factors were discussed. At the beginning, the optical properties of GaN bulk single crystals with different polar directions by liquid phase epitaxy (LPE) were studied by cathodoluminescence (CL) and photoluminescence (PL). The experimental results show that optical properties of bulk GaN with different growth polar directions are different. The CL and PL characteristics of [1122] and [1120] GaN grown in the lateral direction are similar, but the spectra of [0001] GaN is quite different. The impurity peak of the photoluminescence contains two shoulder peaks, peak 1 (2.2 eV) and peak 2 (2.6 eV), which accounted for different proportions in different polar directions. We speculate that they are related to the C_NO_N complex and the 0/+ energy of C_N defect respectively. Then through time of flight secondary ion mass spectrometer (TOF-SIMS) element analysis, the distribution of C impurity is relatively uniform. There is a big difference in the distribution of oxygen impurity. In the [1122] GaN region, the oxygen impurity content gradually increases along the growth direction. Combined with the increase in the intensity of the peak 1 at 2.2 eV in the PL spectra, this phenomenon further proves that there is a positive correlation between the intensity of the 2.2 eV peak and the oxygen impurity.

Key words: GaN, Na-flux, liquld phase epitaxy, photoluminescence, yellow luminescence, O impurity, polar

中图分类号:

O734

任玉娇, 刘宗亮, 顾泓, 董晓鸣, 高晓东, 司志伟, 徐科. LPE生长GaN的不同极性面的光学性质[J]. 人工晶体学报, 2021, 50(6): 996-1001.

REN Yujiao, LIU Zongliang, GU Hong, DONG Xiaoming, GAO Xiaodong, SI Zhiwei, XU Ke. Optical Properties of LPE-GaN Grown in Different Polar Directions[J]. JOURNAL OF SYNTHETIC CRYSTALS, 2021, 50(6): 996-1001.

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