改良泡生法生长720 kg级大尺寸蓝宝石晶体

人工晶体学报 ›› 2021, Vol. 50 ›› Issue (8): 1397-1401.

• 研究快报 • 下一篇

改良泡生法生长720 kg级大尺寸蓝宝石晶体

康森^1,2, 鲁雅荣¹, 石天虎¹, 滕斌^1,2, 宽军¹, 李璐¹, 郝文娟¹, 段斌斌^1,2

1.天通银厦新材料有限公司,银川 750021;
2.天通控股股份有限公司,海宁 314412

收稿日期:2021-06-24 出版日期:2021-08-15 发布日期:2021-09-14
通讯作者: 滕斌,高级工程师。E-mail:tb@tdgcore.com
作者简介:康森(1985—),男,四川省人,高级工程师。E-mail:ks@tdgcore.com
基金资助:
宁夏回族自治区科技厅重点研发项目(2021BDE92033)

Growth of 720 kg Large-Sized Sapphire Crystal by Modified Kyropoulos Method

KANG Sen^1,2, LU Yarong¹, SHI Tianhu¹, TENG Bin^1,2, KUAN Jun¹, LI Lu¹, HAO Wenjuan¹, DUAN Binbin^1,2

1. TDG Yinxia New Material Co., Ltd., Yinchuan 750021, China;
2. TDG Holding Co., Ltd., Haining 314412, China

Received:2021-06-24 Online:2021-08-15 Published:2021-09-14

摘要/Abstract

摘要： 为进一步满足当前新型显示技术、航天、航空等领域对大尺寸、高品质蓝宝石材料的需求,本文采用改良泡生法,通过自主研发的蓝宝石晶体生长设备,生长出质量达720 kg的大尺寸、高品质蓝宝石晶体。该晶体可加工成直径640 mm,无气泡和小角度晶界的大尺寸蓝宝石面板。对晶体上、中、下不同位置的品质进行检测分析,得到晶体的位错密度小于475 cm^-2,摇摆曲线半高宽(FWHM)小于0.004 6°,在400~4 000 nm波段的透过率大于83%,表明晶体内部的微缺陷得到有效控制,晶片的结晶性能和光学性能极佳,达到了预期。

关键词: 改良泡生法, 蓝宝石晶体, 光学窗口, 位错, 晶体生长

Abstract: In order to further meet the current demand for large-sized and high-quality sapphire materials in the current new display technology, aerospace, aviation and other fields, this paper adopts the modified Kyropoulos method and self-developed furnace to grow large-sized, high-quality sapphire crystals weighing 720 kg. Sapphire panel with diameter of 640 mm is obtained from the sapphire, and the panel has no bubbles and low-angle grain boundaries. The quality of the upper, middle and lower parts of the crystal was detected. The results show that the dislocation density of the crystal is less than 475 cm^-2, the FWHM is less than 0.004 6°, and the transmittance in the band of 400 nm to 4 000 nm is more than 83%. It shows that the micro defects in the crystal are controlled, and the crystalline properties and optical properties of the crystal are excellent.

Key words: modified kyropoulos method, sapphire crystal, optical window, dislocation, crystal growth

中图分类号:

TQ164

康森, 鲁雅荣, 石天虎, 滕斌, 宽军, 李璐, 郝文娟, 段斌斌. 改良泡生法生长720 kg级大尺寸蓝宝石晶体[J]. 人工晶体学报, 2021, 50(8): 1397-1401.

KANG Sen, LU Yarong, SHI Tianhu, TENG Bin, KUAN Jun, LI Lu, HAO Wenjuan, DUAN Binbin. Growth of 720 kg Large-Sized Sapphire Crystal by Modified Kyropoulos Method[J]. JOURNAL OF SYNTHETIC CRYSTALS, 2021, 50(8): 1397-1401.

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改良泡生法生长720 kg级大尺寸蓝宝石晶体

Growth of 720 kg Large-Sized Sapphire Crystal by Modified Kyropoulos Method

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