基于视觉辐条图案识别方法的蓝宝石引晶机制研究

人工晶体学报 ›› 2022, Vol. 51 ›› Issue (2): 256-262.

基于视觉辐条图案识别方法的蓝宝石引晶机制研究

陈晨^1,2, 乔铁柱^1,2, 庞宇松³, 郝贵荣⁴

1.太原理工大学新型传感器与智能控制教育部重点实验室,太原 030024;
2.太原理工大学物理与光电工程学院,太原 030024;
3.代尔夫特理工大学机械海运与材料工程学院,荷兰代尔夫特 2600;
4.山西中聚晶科半导体有限公司,晋中 030600

收稿日期:2021-10-08 出版日期:2022-02-15 发布日期:2022-03-14
通讯作者: 乔铁柱,博士,教授。E-mail:qiaotiezhu@tyut.edu.cn
作者简介:陈晨(1997—),女,四川省人,硕士研究生。E-mail:chenchen0868@link.tyut.edu.cn
基金资助:
国家自然科学基金(U1810121);山西省中央引导地方科技发展资金项目(YDZX20201400001796)

Sapphire Seeding Mechanism Based on Visual Spoke Pattern Recognition Method

CHEN Chen^1,2, QIAO Tiezhu^1,2, PANG Yusong³, HAO Guirong⁴

1. Key Laboratory of Advanced Transducers and Intelligent Control System, Ministry of Education, Taiyuan University of Technology, Taiyuan 030024, China;
2. College of Physics and Optoelectronics, Taiyuan University of Technology, Taiyuan 030024, China;
3. Section of Transport Engineering and Logistic, Faculty of Mechanical, Maritime and Materials Engineering, Delft University of Technology, Delft 2600, The Kingdom of the Netherlands;
4. Shanxi Zhongjujingke Semiconductor Co., Ltd., Jinzhong 030600, China

Received:2021-10-08 Online:2022-02-15 Published:2022-03-14

摘要/Abstract

摘要： 工业生产蓝宝石晶体过程中,引晶步骤有着至关重要的地位。引晶必须在温度梯度较小,温度分布趋于稳定的条件下进行。目前,工业生产蓝宝石主要依靠人工经验操控籽晶杆实现引晶操作,但是人工引晶操作的准确性不高会导致成品品质不佳、资源浪费。为此,本文提出一种基于蓝宝石视觉辐条图案识别方法来检测蓝宝石熔体状态自由液面状态,从而实现一种高效率引晶的机制。此方法利用经典骨架化算法细化辐条图案,Harris算子实现特征信息的提取,提取的特征信息放入运动轨迹模型中判断熔体稳定性,分析液面温度分布稳定性从而实现引晶。结果表明,此算法具有有效性,蓝宝石晶体引晶效率大大提高,生产出的成品良率也有提升,可有效指导蓝宝石的工业生产。

关键词: 蓝宝石, 引晶, 温度梯度, 辐条图案, 图案识别, 运动轨迹, 骨架化算法, 特征信息

Abstract: In the process of industrial production of sapphire crystals, the seeding step plays a vital role. Seeding needs to be performed under conditions where the temperature gradient is small and the temperature distribution tends to be stable. At present, the industrial production of sapphire mainly relies on manual experience to control the seed rod to achieve the crystal pilot operation, but the low accuracy of manual pilot operation will lead to poor quality of finished products and waste of resources. Therefore, this paper proposes a method based on sapphire visual spokes pattern recognition method to detect the free liquid surface state of sapphire melt, so as to realize an efficient crystal induction mechanism. In this method, classic skeletoning algorithm was used to refine the spoke pattern, and Harris operator was used to extract the characteristic information. The extracted characteristic information was put into the motion trajectory model to judge the stability of the melt, and the stability of the temperature distribution of the liquid surface was analyzed to achieve crystal induction. Experimental results show that this algorithm is effective, the efficiency of sapphire crystal seeding is greatly improved, and the yield of the finished product is also improved, which can effectively guide the industrial production of sapphire.

Key words: sapphire, seeding, temperature gradient, spoke pattern, pattern recognition, motion trace, skeletonization algorithm, feature information

中图分类号:

O786
TP391.4

陈晨, 乔铁柱, 庞宇松, 郝贵荣. 基于视觉辐条图案识别方法的蓝宝石引晶机制研究[J]. 人工晶体学报, 2022, 51(2): 256-262.

CHEN Chen, QIAO Tiezhu, PANG Yusong, HAO Guirong. Sapphire Seeding Mechanism Based on Visual Spoke Pattern Recognition Method[J]. JOURNAL OF SYNTHETIC CRYSTALS, 2022, 51(2): 256-262.

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