高功率多结905 nm垂直腔面发射激光器

人工晶体学报 ›› 2023, Vol. 52 ›› Issue (5): 818-824.

高功率多结905 nm垂直腔面发射激光器

赵飞云¹, 任翱博¹, 巫江^1,2

1.电子科技大学,基础与前沿研究院,成都 610054;
2.电子科技大学,电子薄膜与集成器件国家重点实验室,成都 611731

收稿日期:2023-03-23 出版日期:2023-05-15 发布日期:2023-06-05
通信作者: 巫江,博士,教授。E-mail:jiangwu@uestc.edu.cn;任翱博,博士,副研究员。E-mail:aobo.ren@uestc.edu.cn
作者简介:赵飞云(1997—),男,四川省人,博士研究生。E-mail:zhaofy1997@163.com
基金资助:
国家重点研发计划(2021YFA1401100);四川省青年科技创新研究团队(20CXTD0090);国家自然科学基金青年项目(52202165);四川省自然科学基金(2022NSFSC0918)

High-Power Multi-Junction 905 nm Vertical-Cavity Surface-Emitting Lasers

ZHAO Feiyun¹, REN Aobo¹, WU Jiang^1,2

1. Institute of Fundamental and Frontier Sciences, University of Electronic Science and Technology of China, Chengdu 610054, China;
2. State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 611731, China

Received:2023-03-23 Online:2023-05-15 Published:2023-06-05

摘要/Abstract

摘要： 本文针对激光雷达等中、远距离传感应用, 设计并制备了3结905 nm垂直腔面发射激光器(VCSEL)。通过PICS3D软件对多结VCSEL相邻有源区间距和P型分布布拉格反射镜(DBR)对数进行仿真计算,设计了具有2λ的相邻有源区间距和14对P型DBR的3结VCSEL。在此基础上,外延生长和制备了100单元3结905 nm VCSEL阵列,单元氧化孔径为15 μm。在窄脉冲条件下(脉冲宽度 100 ns,占空比 0.05%),该阵列的最大峰值功率达到24.7 W,峰值功率密度为182 W/mm²。

关键词: 垂直腔面发射激光器, 多结级联, 金属有机物化学气相沉积, 隧道结, 驻波场, 窄脉冲测试

Abstract: Three-junction 905 nm vertical-cavity surface-emitting laser (VCSEL) was designed and fabricated for medium and long range sensing applications such as lidar. Through simulations using PICS3D software, the optimal adjacent active region spacing and number of P-type distributed Bragg reflectors (DBR) in the multi-junction VCSEL were determined, resulting in a design featuring a 2λ adjacent active region spacing and 14 pairs of P-type DBR. Using this design, a 100-element three-junction VCSEL array was grown and fabricated with an oxide aperture of 15 μm. The resulting array achieves a maximum peak power of 24.7 W and a peak power density of 182 W/mm² under narrow pulse conditions (with a pulse width of 100 ns and a duty cycle of 0.05%).

Key words: vertical-cavity surface-emitting laser, multi-diode cascade, metal-organic chemical vapor deposition, tunnel junction, standing wave pattern, narrow pulse measurement

中图分类号:

TN248.4

赵飞云, 任翱博, 巫江. 高功率多结905 nm垂直腔面发射激光器[J]. 人工晶体学报, 2023, 52(5): 818-824.

ZHAO Feiyun, REN Aobo, WU Jiang. High-Power Multi-Junction 905 nm Vertical-Cavity Surface-Emitting Lasers[J]. JOURNAL OF SYNTHETIC CRYSTALS, 2023, 52(5): 818-824.

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