基于Fluent的多晶硅还原炉关键结构优化设计

人工晶体学报 ›› 2023, Vol. 52 ›› Issue (11): 1952-1960.

基于Fluent的多晶硅还原炉关键结构优化设计

孙泽刚¹, 葛自豪¹, 石荣秋¹, 费天文²

1.四川轻化工大学机械工程学院,自贡 643000;
2.四川省华夏阀门有限公司,自贡 643000

收稿日期:2023-05-28 出版日期:2023-11-15 发布日期:2023-11-17
作者简介:孙泽刚(1975—),男,四川省人,博士,副教授。E-mail:szg527@126.com
基金资助:
四川省科技计划(2022YFG0075);过程装备与控制工程四川省高校重点实验室开放基金(GK202104)

Optimization Design of Key Structure of Polycrystalline Silicon Reduction Furnace Based on Fluent

SUN Zegang¹, GE Zihao¹, SHI Rongqiu¹, FEI Tianwen²

1. College of Mechanical Engineering, Sichuan University of Science & Engineering, Zigong 643000, China;
2. Sichuan Huaxia Valve Co., Ltd., Zigong 643000, China

Received:2023-05-28 Online:2023-11-15 Published:2023-11-17

摘要/Abstract

摘要： 改良西门子法是多晶硅生产的主要方法,而多晶硅还原炉是多晶硅制备的主要设备。针对传统多晶硅还原炉的流场、温度场和辐射场不均匀导致生产的多晶硅尺寸不规则的问题,本文对还原炉的炉顶封头结构、出气口位置布局和硅棒底盘布局进行优化设计。利用Fluent软件Do辐射模块对多晶硅还原炉进行气-固辐射仿真分析,对比优化前后的流场、温度场和辐射场的云图、流线图等,结果表明:上出气口排气设计能够有效提高炉内气体流动速度,减少炉内气体回流,增加气体流动均匀性,有效解决炉内顶部产生的温度死区,平衡炉内上下温度差;椭圆形顶部封头优化了还原炉整体空间,降低设计成本,有效抑制圆形封头中气体旋涡的产生,增加炉内气体流动均匀性;采用平行圆周对称式硅棒增加整体辐射量,优化了传统还原炉中外圈硅棒与中心硅棒辐射不均匀现象,有效防止了不规则硅棒的产生,提高了多晶硅的产量,为多晶硅还原炉的结构设计提供一个新的方案。

关键词: 多晶硅还原炉, Do辐射模块, 结构设计, 出气口布局, 炉顶封头, 硅棒底盘布局

Abstract: The improved Siemens method is the main method for polycrystalline silicon production, and the polycrystalline silicon reduction furnace is the main equipment for polycrystalline silicon preparation. Aiming at the problem of irregular size of polycrystalline silicon produced by the uneven flow field, temperature field, and radiation field of traditional polycrystalline silicon reduction furnaces. This article optimizes the design of the furnace top sealing head structure, air outlet layout, and silicon rod chassis layout of the reduction furnace. Using the Do radiation module of Fluent software, a gas-solid radiation simulation analysis was conducted on a polycrystalline silicon reduction furnace. The cloud and streamline diagrams of the flow field, temperature field, and radiation field before and after optimization were compared. The results show that the exhaust design of the up-outlet effectively improve the gas flow velocity in the furnace, reduce gas reflux, increase gas flow uniformity, effectively solve the temperature dead zone generated at the top of the furnace, and balance the temperature difference between the upper and lower parts of the furnace; the elliptical top head optimizes the overall space of the reduction furnace, reduces design costs, effectively inhibits the generation of gas vortices in the circular head, and increases the uniformity of gas flow in the furnace; at the same time, a parallel circular symmetric silicon rod is used to increase the overall radiation amount, optimizing the uneven radiation phenomenon between the outer ring silicon rod and the central silicon rod in traditional reduction furnaces, effectively preventing the generation of irregular silicon rods, improving the production of polycrystalline silicon, and providing a new solution for the design of polycrystalline silicon reduction furnaces.

Key words: polycrystalline silicon reduction furnace, Do radiation module, structural design, air outlet layout, furnace top sealing head, silicon rod chassis layout

中图分类号:

TK175
O78

孙泽刚, 葛自豪, 石荣秋, 费天文. 基于Fluent的多晶硅还原炉关键结构优化设计[J]. 人工晶体学报, 2023, 52(11): 1952-1960.

SUN Zegang, GE Zihao, SHI Rongqiu, FEI Tianwen. Optimization Design of Key Structure of Polycrystalline Silicon Reduction Furnace Based on Fluent[J]. JOURNAL OF SYNTHETIC CRYSTALS, 2023, 52(11): 1952-1960.

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