适温离子交换掺铒铌酸锂薄膜的制备研究

人工晶体学报 ›› 2024, Vol. 53 ›› Issue (3): 441-448.

• “铌酸锂集成光子学”专栏 • 上一篇下一篇

适温离子交换掺铒铌酸锂薄膜的制备研究

何雨轩¹, 吴江威¹, 陈玉萍^1,2, 陈险峰^1,3,4

1.上海交通大学物理与天文学院,区域光纤通信网与新型光通信系统国家重点实验室,上海 200240;
2.宁夏大学物理学院,银川 750021;
3.山东师范大学,光场调控及应用协同创新中心,济南 250358;
4.上海量子科学研究中心,上海 201315

收稿日期:2024-01-15 发布日期:2024-04-02
通信作者: 陈玉萍,博士,教授。E-mail:ypchen@sjtu.edu.cn
作者简介:何雨轩(2000—),男,安徽省人,硕士研究生。E-mail:heyuxuan816@sjtu.edu.cn
基金资助:
国家自然科学基金重点项目(12134009)

Study on Fabrication of Erbium-Doped Lithium Niobate Thin Film Based on Low Temperature Ion Exchange Method

HE Yuxuan¹, WU Jiangwei¹, CHEN Yuping^1,2, CHEN Xianfeng^1,3,4

1. State Key Laboratory of Advanced Optical Communication Systems and Networks, School of Physics and Astronomy, Shanghai Jiao Tong University, Shanghai 200240, China;
2. School of Physics, Ningxia University, Yinchuan 750021, China;
3. Collaborative Innovation Center of Light Manipulations and Applications, Shandong Normal University, Jinan 250358, China;
4. Shanghai Research Center for Quantum Sciences, Shanghai 201315, China

Received:2024-01-15 Published:2024-04-02

摘要/Abstract

摘要： 本文通过制备KNO₃和Er(NO₃)₃熔融混合物,将其与铌酸锂薄膜在高温管式炉中混合进行适温热扩散,并结合退火工艺,发明了一种直接在铌酸锂薄膜上掺杂Er³⁺的方法。通过不断变换热扩散温度、掺杂试剂浓度比例和晶体切向等参数,用控制变量法探究了不同参数对适温离子交换法掺杂Er³⁺效果的影响,在热扩散和退火温度360 ℃及KNO₃和Er(NO₃)₃质量比25∶1的参数设置下获得了表面形貌较佳的Z切掺铒铌酸锂薄膜。通过飞行时间二次离子质谱仪并利用已知掺杂浓度的薄膜进行定标,检测了所获得的掺铒铌酸锂薄膜中的Er³⁺浓度情况,对所采用适温离子交换法的有效性进行了验证。这一方法大幅简化了铌酸锂薄膜掺杂的工艺,同时节约了成本,有助于后续在铌酸锂薄膜平台上实现分区掺杂的工作,为未来定制化铌酸锂光子集成平台的搭建提供参考。

关键词: 铌酸锂薄膜, Er³⁺, 适温离子交换, 二次离子质谱仪

Abstract: In this paper, by preparing a molten mixture of KNO₃ and Er(NO₃)₃, mixing it with a thin film lithium niobate in a high-temperature tube furnace for low temperature thermal diffusion, and combining it with an annealing process, a method was invented to directly dope the thin film lithium niobate with Er³⁺. By continuously changing parameters such as thermal diffusion temperature, doping reagent concentration ratio and crystal tangential direction, the influence of different parameters on the effect of doping Er³⁺ by the low temperature ion exchange method was explored through comparative experiments. When the thermal diffusion and annealing temperature were 360 ℃, and under the parameter setting of KNO₃ and Er(NO₃)₃ mass ratio of 25∶1, a Z-cut erbium-doped thin film lithium niobate with good surface morphology was obtained. The Er³⁺ concentration in the obtained erbium-doped thin film lithium niobate was detected by time-of-flight secondary ion mass spectrometry, which verified the actual effect of the low temperature ion exchange method used. This method greatly simplifies the thin film lithium niobate doping process, while saving costs, and will help to achieve subsequent selectively doping on the thin film lithium niobate platform and provides a viable solution for the construction of a customized lithium niobate photonic integration platform in the future.

Key words: thin film lithium niobate, Er³⁺, low temperature ion exchange, secondary ion mass spectrometry

中图分类号:

O734

何雨轩, 吴江威, 陈玉萍, 陈险峰. 适温离子交换掺铒铌酸锂薄膜的制备研究[J]. 人工晶体学报, 2024, 53(3): 441-448.

HE Yuxuan, WU Jiangwei, CHEN Yuping, CHEN Xianfeng. Study on Fabrication of Erbium-Doped Lithium Niobate Thin Film Based on Low Temperature Ion Exchange Method[J]. JOURNAL OF SYNTHETIC CRYSTALS, 2024, 53(3): 441-448.

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适温离子交换掺铒铌酸锂薄膜的制备研究

Study on Fabrication of Erbium-Doped Lithium Niobate Thin Film Based on Low Temperature Ion Exchange Method

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