尺寸效应对坩埚下降法生长氟化钙晶体影响机制的数值模拟分析

人工晶体学报 ›› 2024, Vol. 53 ›› Issue (6): 973-981.

尺寸效应对坩埚下降法生长氟化钙晶体影响机制的数值模拟分析

施宇峰^1,2, 王鹏飞¹, 穆宏赫^1,2, 苏良碧^1,2

1.中国科学院上海硅酸盐研究所,上海 201899;
2.中国科学院大学材料科学与光电工程中心,北京 100049

收稿日期:2023-12-20 出版日期:2024-06-15 发布日期:2024-06-20
通信作者: 王鹏飞,博士。E-mail:pwf579@outlook.com; 苏良碧,博士,研究员。E-mail:suliangbi@mail.sic.ac.cn
作者简介:施宇峰(1999—),男,浙江省人,硕士研究生。E-mail:shiyufeng21@mails.ucas.ac.cn
基金资助:
国家重点研发计划(2021YFE0104800);国家自然科学基金(61925508);上海市科委项目(23511102700,23YF1413400);中国科学院稳定支持基础研究领域青年团队计划(YSBR-024)

Numerical Simulation Investigation of Size Effect on Calcium Fluoride Crystals Grown by Vertical Bridgman Method

SHI Yufeng^1,2, WANG Pengfei¹, MU Honghe^1,2, SU Liangbi^1,2

1. Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai 201899, China;
2. Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China

Received:2023-12-20 Online:2024-06-15 Published:2024-06-20

摘要/Abstract

摘要： 高质量大尺寸氟化钙晶体是深紫外光刻、空天相机等高端应用不可或缺的光学材料,同时制备高质量大尺寸晶体也是晶体生长领域的难题。本文以数值手段分别模拟了3、7和20英寸(1英寸=2.54 cm)氟化钙晶体在不同生长阶段的传热、流动及相变过程。结果表明,晶体尺寸增加大幅加强熔体流动强度,而且造成坩埚外壁散热部分的面积急剧增加,由此引发固液界面局部凹陷、径向温差增大、晶体边缘-中心温差翻转、生长界面附近的轴向温梯大幅衰减等问题。此外,本文还就大尺寸氟化钙晶体生长中的坩埚下降速率和发热体功率的优化控制策略进行了探讨。

关键词: CaF₂晶体, 坩埚下降法, 尺寸效应, 数值模拟, 固液界面, 温度梯度

Abstract: High-quality, large-size CaF₂ crystals are urgently needed for advanced applications such as deep ultraviolet lithography and aerospace cameras. However, growing such crystals is a challenging task in the field of crystal growth. Heat transfer, flow, and phase change processes of 3, 7, and 20 inch (1 inch=2.54 cm) CaF₂ crystals at different growth stages on the vertical Bridgman growth were conducted by numerical simulation. The results show that as the crystal size increases, the melt flow strength and the area of heat dissipation on the crucible wall increase, resulting in problems such as local depression of the melt-crystal interface, increase in the radial temperature difference, reversal of the temperature difference between the crystal edge and center, and decrease in the axial temperature gradient near the melt-crystal interface. Furthermore, this article discusses optimization strategies for growth rate and power of heater in the growth of large-size CaF₂ crystals.

Key words: CaF₂ crystal, vertical Bridgman method, size effect, numerical simulation, melt-crystal interface, temperature gradient

中图分类号:

O782

施宇峰, 王鹏飞, 穆宏赫, 苏良碧. 尺寸效应对坩埚下降法生长氟化钙晶体影响机制的数值模拟分析[J]. 人工晶体学报, 2024, 53(6): 973-981.

SHI Yufeng, WANG Pengfei, MU Honghe, SU Liangbi. Numerical Simulation Investigation of Size Effect on Calcium Fluoride Crystals Grown by Vertical Bridgman Method[J]. JOURNAL OF SYNTHETIC CRYSTALS, 2024, 53(6): 973-981.

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