关键词: β-Ga₂O₃薄膜, Al掺杂, 磁控溅射, Ga₂O₃/Al/Ga₂O₃/Al/Ga₂O₃复合结构, 光吸收, 光学带隙

Abstract: In recent years, semiconductor devices are developing towards high heat dissipation, high breakdown field strength and low energy consumption, so the ultra-wide band semiconductor material β-Ga₂O₃ has a broad application prospect. However, effective doping is the basis for realizing β-Ga₂O₃ devices. In this paper, Ga₂O₃/Al/Ga₂O₃/Al/Ga₂O₃ composite structure is experimentally prepared by magnetron sputtering, and the Al atoms are thermally diffused into the film by high-temperature annealing at the same time, so as to form Al-doped β-Ga₂O₃ thin film. Then, the laser zone melting method was used to melt and recrystallize the film area to further enhance the doping quality. The Al-doped β-Ga₂O₃ thin films were tested and characterized in terms of crystal properties, impurity content and optical properties. The experimental results show that: Al doping basically does not change the crystal structure of β-Ga₂O₃ thin films; the impurity content is gradually enhanced as the sputtering time of the Al layer becomes longer; in terms of the optical properties, the ultraviolet (UV) absorptivity of the films is 40% and 50% when the Al sputtering time is 5 and 10 s, and the UV absorption of the Al-doped β-Ga₂O₃ thin films is gradually enhanced with the increase of Al sputtering time; the light absorption of β-Ga₂O₃ thin film is close to 90% when the Al sputtering time is 300 s; and the low concentration of Al doping leads to the narrowing of the band gap width of β-Ga₂O₃ thin film.

Key words: β-Ga₂O₃thin film, Al doping, magnetron sputtering, Ga₂O₃/Al/Ga₂O₃/Al/Ga₂O₃composite structure, light absorption, optical band gap