VO2-SiO2复合薄膜的激光诱导损伤特性研究

摘要/Abstract

摘要： 本文采用溶胶-凝胶法制备了VO₂和VO₂-SiO₂复合薄膜,并用X射线衍射仪(XRD)和紫外-可见分光光度计对薄膜的相结构和透过率进行了表征。结果表明,制备的VO₂为单斜相(B),VO₂-SiO₂复合薄膜的XRD图谱和VO₂类似,薄膜在450~800 nm的光学透过率达到了90%以上。激光诱导损伤阈值(LIDT)测试结果显示,VO₂-SiO₂复合薄膜的LIDT为3.9 J/cm²,相比VO₂薄膜提高了77.3%。通过场发射扫描电子显微镜(FESEM)和台阶仪研究了VO₂薄膜和VO₂-SiO₂复合薄膜的损伤形貌差异,VO₂薄膜呈现出熔融型损伤,VO₂-SiO₂薄膜则呈现出熔融型损伤和应力型损伤的共同特征。此外,构建了不同薄膜的激光诱导损伤模型,揭示了相关损伤特性和内在机制。

关键词: VO₂, SiO₂, 溶胶-凝胶法, 光学透过率, 激光诱导损伤阈值, 损伤特性

Abstract: The VO₂ and VO₂-SiO₂ composite films were prepared by sol-gel method. The phase structure and transmittance of films were characterized by X-ray diffraction (XRD) and ultraviolet visible spectrophotometer. The results reveal that the prepared VO₂ film is monoclinic phase (B), and the XRD patterns of VO₂-SiO₂ composite film is similar to that of VO₂ film. The optical transmittance of films have reached over 90% within the range of 450 nm to 800 nm. The laser induced damage threshold (LIDT) of VO₂-SiO₂ composite film is 3.9 J/cm², which is 77.3% higher than that of VO₂ film. The difference in damage morphology between VO₂ film and VO₂-SiO₂ film were studied by FESEM and step analyzer. The VO₂ film exhibits melt type damage, while the VO₂-SiO₂ film exhibits melt type damage and stress damage. In addition, laser-induced damage models for different films were constructed and damage characteristics and underlying mechanisms were discussed.

Key words: VO₂, SiO₂, sol-gel method, optical transmittance, LIDT, damage characteristic

中图分类号:

韩笋, 李艳. VO₂-SiO₂复合薄膜的激光诱导损伤特性研究[J]. 人工晶体学报, 2024, 53(10): 1738-1744.

HAN Sun, LI Yan. Laser-Induced Damage Characteristics of VO₂-SiO₂ Composite Films[J]. JOURNAL OF SYNTHETIC CRYSTALS, 2024, 53(10): 1738-1744.

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VO₂-SiO₂复合薄膜的激光诱导损伤特性研究

Laser-Induced Damage Characteristics of VO₂-SiO₂ Composite Films

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