Study on Mechanical Polishing for CVD Diamond Thick Film and Its Residual Stresses

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[1]	SUN Xinghan, LI Jihu, ZHANG Wei, ZENG Qunfeng, ZHANG Junfeng. Research Progress on Material Removal Non-Uniformity in Silicon Carbide Chemical Mechanical Polishing [J]. JOURNAL OF SYNTHETIC CRYSTALS, 2024, 53(4): 585-599.
[2]	HUANG Shu-tao;ZHOU Li;JIAO Ke-ru;XU Li-fu. Thermochemical Polishing Techniques of CVD Diamond Films [J]. JOURNAL OF SYNTHETIC CRYSTALS, 2009, 38(6): 1456-1462.

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