Abstract: Nano-silicon particles were prepared using LICVD technique. The transform discipline of nano-silicon microstructure was studied at different parameters. The effect mechanism of parameters was studied. The results show that in the conditions of constant laser power density and reactive gas components, with the increase of the reactive gas flux, the microstructures of nano-silicon particles are dramatically different, the grain size becoming smaller gradually and the amorphous phase increasing.

Key words: Nano-silicon particles were prepared using LICVD technique. The transform discipline of nano-silicon microstructure was studied at different parameters. The effect mechanism of parameters was studied. The results show that in the conditions of constant laser power density and reactive gas components, with the increase of the reactive gas flux, the microstructures of nano-silicon particles are dramatically different, the grain size becoming smaller gradually and the amorphous phase increasing.