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JOURNAL OF SYNTHETIC CRYSTALS ›› 2005, Vol. 34 ›› Issue (1): 56-59.

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Analysis of Silicon Thin Film Prepared at Different Hydrogen Dilutions by VHF-PECVD

ZHANG Xiao-dan;GAO Yan-tao;ZHAO Ying;ZHU Feng;WEI Chang-chun;SUN Jian;HOU Guo-fu;XUE Jun-ming;ZHANG De-kun;REN Hui-zhi;GENG Xin-hua;XIONG Shao-zhen   

  • Online:2005-02-15 Published:2021-01-20

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