Fabrication of Microcrystalline Silicon Films by VHF-PECVD and Their Microstructure Study

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JOURNAL OF SYNTHETIC CRYSTALS ›› 2005, Vol. 34 ›› Issue (3): 475-478.

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Fabrication of Microcrystalline Silicon Films by VHF-PECVD and Their Microstructure Study

ZHANG Xiao-dan;GAO Yan-tao;ZHAO Ying;ZHU Feng;WEI Chang-chun;SUN Jian;GENG Xin-hua;XIONG Shao-zhen

Online:2005-06-15 Published:2021-01-20

Abstract

CLC Number:

TK514

ZHANG Xiao-dan;GAO Yan-tao;ZHAO Ying;ZHU Feng;WEI Chang-chun;SUN Jian;GENG Xin-hua;XIONG Shao-zhen. Fabrication of Microcrystalline Silicon Films by VHF-PECVD and Their Microstructure Study[J]. Journal of Synthetic Crystals, 2005, 34(3): 475-478.

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Fabrication of Microcrystalline Silicon Films by VHF-PECVD and Their Microstructure Study

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