Microstructure of Microcrystalline Silicon Film by Plasma Enhanced CVD

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JOURNAL OF SYNTHETIC CRYSTALS ›› 2005, Vol. 34 ›› Issue (4): 753-759.

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Microstructure of Microcrystalline Silicon Film by Plasma Enhanced CVD

CHEN Yong-sheng;YANG Shi-e;LU Jing-xiao;GAO Xiao-yong;ZHANG Yu-xiang;WANG Hai-yan;LI Rui

Online:2005-08-15 Published:2021-01-20

Abstract

CLC Number:

O484.1

CHEN Yong-sheng;YANG Shi-e;LU Jing-xiao;GAO Xiao-yong;ZHANG Yu-xiang;WANG Hai-yan;LI Rui. Microstructure of Microcrystalline Silicon Film by Plasma Enhanced CVD[J]. Journal of Synthetic Crystals, 2005, 34(4): 753-759.

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Microstructure of Microcrystalline Silicon Film by Plasma Enhanced CVD

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