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JOURNAL OF SYNTHETIC CRYSTALS ›› 2006, Vol. 35 ›› Issue (3): 510-513.
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JIA Hu-jun;YANG Yin-tang;CHAI Chang-chun;LI Yue-jin
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RSSOnline:2006-06-15
Published:2021-01-20
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JIA Hu-jun;YANG Yin-tang;CHAI Chang-chun;LI Yue-jin. Influences of Surface Pretreatment on SiC Films Grown by Atmospheric Pressure Chemical Vapor Deposition Process on SiO2/Si Structures[J]. Journal of Synthetic Crystals, 2006, 35(3): 510-513.
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