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JOURNAL OF SYNTHETIC CRYSTALS ›› 2006, Vol. 35 ›› Issue (5): 1113-1117.

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Preparation of Preferentially Orientated AlN (002) Thin Film by DC Reactive Magnetron Sputtering

WANG Zhi-wu;LIU Wen;YANG Qing-dou;WEI Jing-ting   

  • Online:2006-10-15 Published:2021-01-20

CLC Number: