Study on Preparation of Polycrystalline Silicon Thin Films by PECVD

JOURNAL OF SYNTHETIC CRYSTALS ›› 2006, Vol. 35 ›› Issue (5): 1151-1154.

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Study on Preparation of Polycrystalline Silicon Thin Films by PECVD

ZHAO Xiao-feng;WEN Dian-zhong

Online:2006-10-15 Published:2021-01-20

Abstract

CLC Number:

TM614

ZHAO Xiao-feng;WEN Dian-zhong. Study on Preparation of Polycrystalline Silicon Thin Films by PECVD[J]. Journal of Synthetic Crystals, 2006, 35(5): 1151-1154.

Study on Preparation of Polycrystalline Silicon Thin Films by PECVD

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