Study of Columnar Grain in Poly-Si Thin Films

Welcome to Journal of Synthetic Crystals! Today is

E-mail Alert　

RSS

Share:

JOURNAL OF SYNTHETIC CRYSTALS ›› 2006, Vol. 35 ›› Issue (5): 1159-1162.

Previous Articles

Study of Columnar Grain in Poly-Si Thin Films

ZHANG Li-wei;ZHAO Xin-qu;LU Jing-xiao;GAO Xiao-yong;CHEN Yong-sheng;JIN Rui-min

Online:2006-10-15 Published:2021-01-20

Abstract

CLC Number:

TN304.05

ZHANG Li-wei;ZHAO Xin-qu;LU Jing-xiao;GAO Xiao-yong;CHEN Yong-sheng;JIN Rui-min. Study of Columnar Grain in Poly-Si Thin Films[J]. Journal of Synthetic Crystals, 2006, 35(5): 1159-1162.

[1]	ZHONG Qiongli, WANG Xu, MA Kui, YANG Fashun. Effect of Al Doping on the Optical Properties of β-Ga₂O₃ Thin Films [J]. JOURNAL OF SYNTHETIC CRYSTALS, 2024, 53(8): 1352-1360.
[2]	JIN Guo;ZHU Qingzhi. Study on the Application of p-type GaSb Window Layer in Thermophotovoltaic Cells [J]. JOURNAL OF SYNTHETIC CRYSTALS, 2020, 49(4): 638-645.
[3]	WEI Ye;ZHOU Bing;SANG Sheng-bo;DENG Xiao;CHAI Jing;CHEN Ze-hua;ZHANG Wen-dong. Mechanism Study on Size Effects of Cluster Implantation on Silicon [J]. JOURNAL OF SYNTHETIC CRYSTALS, 2017, 46(6): 1064-1071.
[4]	LI Yun;ZHAO Zhi-fei;LU Dong-sai;ZHU Zhi-ming;LI Zhong-hui. Uniformity Control for 100 mm 4° SiC Epilayers Based on Orthogonal Experiment [J]. JOURNAL OF SYNTHETIC CRYSTALS, 2014, 43(10): 2699-2704.
[5]	ZHANG Hua-fu;LEI Cheng-xin;LIU Han-fa;YUAN Chang-kun. Preparation of Transparent Conducting ZnO∶ Zr Films Deposited by DC Reactive Magnetron Sputtering [J]. JOURNAL OF SYNTHETIC CRYSTALS, 2012, 41(4): 977-981.
[6]	ZHANG Na-na;HAN Shu-juan;GAO Wen-lan;ZHANG Huai-jin;WANG Ji-yang. Growth and Low-temperature Raman Spectra Study of Ca0.4Ba0.6Nb2O6 Crystal [J]. JOURNAL OF SYNTHETIC CRYSTALS, 2011, 40(5): 1093-1096.
[7]	SUI Yan-ping;RUAN Jian-ming;LI Tao;CAI Hong-kun;HE Wei-yu;ZHANG De-xian. Effect of Substrate Temperatures on the Properties of GaSb Polycrystalline Films by Co-evaporation [J]. JOURNAL OF SYNTHETIC CRYSTALS, 2011, 40(5): 1115-1119.
[8]	WANG Ya-fang;ZHANG Hao;WU Xing-yan;WU Zheng-long. Photoluminescence of Rare-earth ( Eu3+ 、Pr3+ 、Nd3+ 、Er3+ )Doped Bi4Ge3O12 Crystals [J]. JOURNAL OF SYNTHETIC CRYSTALS, 2011, 40(4): 862-866.
[9]	ZHANG Hua-fu;CHEN Qin-sheng;LIU Han-fa. Effect of Target-to-substrate Distance on the Properties of Zirconium-doped Zinc Oxide Transparent Conductive Films [J]. JOURNAL OF SYNTHETIC CRYSTALS, 2010, 39(6): 1412-1416.
[10]	XIAO Hu;MENG Xian-quan;ZHU Zhen-hua;JIN Peng;LIU Feng-qi;WANG Zhan-guo. Twice Annealing to Fabricate Quantum Dots of III-V Semiconductors [J]. JOURNAL OF SYNTHETIC CRYSTALS, 2010, 39(3): 747-750.
[11]	. Effect of Film Thickness on Structure and Optoelectrical Properties of Zr, Al Co-doped ZnO Transparent Conducting Thin Films [J]. JOURNAL OF SYNTHETIC CRYSTALS, 2010, 39(1): 169-173.
[12]	SUN Xiao-gang;CHENG Li;DU Guo-ping. Investigation on the Radar Wave Absorbing Properties of Aligned Array Carbon Nanotubes [J]. JOURNAL OF SYNTHETIC CRYSTALS, 2009, 38(5): 1114-1118.
[13]	YAN Chun-yu;GAO Fei;ZHANG Jia-wen;FANG Xiao-ling;LIU Wei;SUN Jie;QUAN Nai-cheng. Preparation of Multilayered Ge Nanocrystals by Magnetron Sputtering and Annealing Method [J]. JOURNAL OF SYNTHETIC CRYSTALS, 2009, 38(3): 705-709.
[14]	XU Qing-an;ZHANG Jing-wen;YANG Xiao-dong;JU Kai-ru;HE Yong-ning;HOU Xun. Effect of Growth Temperature on the Properties of ZnO Thin Films Prepared by Laser Molecular Beam Epitaxy [J]. JOURNAL OF SYNTHETIC CRYSTALS, 2006, 35(2): 248-252.
[15]	ZHANG Guan-jie;SHU Yong-chun;PI Biao;YAO Jiang-hong;LIN Yao-wang;SHU Qiang;LIU Ru-bin;WANG Zhan-guo;XU Jing-jun. Reflectance Spectrum Simulation and Optimized Growth of AlAs/GaAs Distributed Bragg Reflector (DBR) [J]. JOURNAL OF SYNTHETIC CRYSTALS, 2005, 34(6): 977-981.

Study of Columnar Grain in Poly-Si Thin Films

PDF (PC)

Knowledge

Abstract

Cite this article

share this article

References

Related Articles 15

Recommended Articles

Metrics

Comments