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JOURNAL OF SYNTHETIC CRYSTALS ›› 2006, Vol. 35 ›› Issue (6): 1203-1208.

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Preparation of High-quality Hydrogenated Microcrystalline Silicon Thin Films Using Two-step-pressure Method

ZHU Xiu-hong;CHEN Guang-hua;LIU Guo-han;DING Yi;HE Bin;ZHANG Wen-li;MA Zhan-jie;GAO Zhi-hua;LI Zhi-zhong   

  • Online:2006-12-15 Published:2021-01-20

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