High Conductive p-type Microcrystalline Silicon with High Crystallinity Prepared by High-pressure RF-PECVD

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JOURNAL OF SYNTHETIC CRYSTALS ›› 2007, Vol. 36 ›› Issue (1): 85-88.

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High Conductive p-type Microcrystalline Silicon with High Crystallinity Prepared by High-pressure RF-PECVD

HOU Guo-fu;XUE Jun-ming;YUAN Yu-jie;ZHANG De-kun;SUN Jian;ZHANG Jian-jun;ZHAO Ying;GENG Xin-hua

Online:2007-02-15 Published:2021-01-20

Abstract

CLC Number:

TN304

HOU Guo-fu;XUE Jun-ming;YUAN Yu-jie;ZHANG De-kun;SUN Jian;ZHANG Jian-jun;ZHAO Ying;GENG Xin-hua. High Conductive p-type Microcrystalline Silicon with High Crystallinity Prepared by High-pressure RF-PECVD[J]. Journal of Synthetic Crystals, 2007, 36(1): 85-88.

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High Conductive p-type Microcrystalline Silicon with High Crystallinity Prepared by High-pressure RF-PECVD

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