Preparation Research of ZnO Thin Films at Room-temperature by DC Magnetron Sputtering

JOURNAL OF SYNTHETIC CRYSTALS ›› 2008, Vol. 37 ›› Issue (2): 461-465.

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Preparation Research of ZnO Thin Films at Room-temperature by DC Magnetron Sputtering

ZHAO Xiao-feng;WEN Dian-zhong;GAO Lai-xu

Online:2008-04-15 Published:2021-01-20

Abstract

CLC Number:

TM614

ZHAO Xiao-feng;WEN Dian-zhong;GAO Lai-xu. Preparation Research of ZnO Thin Films at Room-temperature by DC Magnetron Sputtering[J]. Journal of Synthetic Crystals, 2008, 37(2): 461-465.

Preparation Research of ZnO Thin Films at Room-temperature by DC Magnetron Sputtering

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