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JOURNAL OF SYNTHETIC CRYSTALS ›› 2008, Vol. 37 ›› Issue (4): 895-900.
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WANG Feng-ying;GUO Hui-bin;TANG Wei-zhong;LU Fan-xiu
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RSSOnline:2008-08-15
Published:2021-01-20
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WANG Feng-ying;GUO Hui-bin;TANG Wei-zhong;LU Fan-xiu. Simulation and Comparison of Microwave Plasma in Cylindrical and Ellipsoidal Microwave Plasma Chemical Vapor Deposition Cavity[J]. Journal of Synthetic Crystals, 2008, 37(4): 895-900.
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