Numerical Simulation of Flow and Temperature Field in MOCVD Reactor

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JOURNAL OF SYNTHETIC CRYSTALS ›› 2008, Vol. 37 ›› Issue (6): 1342-1348.

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Numerical Simulation of Flow and Temperature Field in MOCVD Reactor

ZHONG Shu-quan;REN Xiao-min;WANG Qi;HUANG Hui;HUANG Yong-qing;ZHANG Xia;CAI Shi-wei

Online:2008-12-15 Published:2021-01-20

Abstract

CLC Number:

TN304

ZHONG Shu-quan;REN Xiao-min;WANG Qi;HUANG Hui;HUANG Yong-qing;ZHANG Xia;CAI Shi-wei. Numerical Simulation of Flow and Temperature Field in MOCVD Reactor[J]. Journal of Synthetic Crystals, 2008, 37(6): 1342-1348.

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Numerical Simulation of Flow and Temperature Field in MOCVD Reactor

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