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JOURNAL OF SYNTHETIC CRYSTALS ›› 2009, Vol. 38 ›› Issue (1): 16-20.

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Effect of Oxygen Partial Pressure on the Structure and Mechanical Properties of HfOxNy Thin Films

LIU Wei;SU Xiao-ping;ZHANG Shu-yu;YAN Lan-qin;WANG Hong-bin;LIU Jia-he   

  • Online:2009-02-15 Published:2021-01-20

CLC Number: