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JOURNAL OF SYNTHETIC CRYSTALS ›› 2009, Vol. 38 ›› Issue (1): 231-234.
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ZHANG Li-wei;YU Ze-tong;YANG Gen;LU Jing-xiao
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RSSOnline:2009-02-15
Published:2021-01-20
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ZHANG Li-wei;YU Ze-tong;YANG Gen;LU Jing-xiao. Study on the Microstructure of Microcrystalline Silicon Thin Films by VHF-PECVD[J]. Journal of Synthetic Crystals, 2009, 38(1): 231-234.
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