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JOURNAL OF SYNTHETIC CRYSTALS ›› 2009, Vol. 38 ›› Issue (2): 387-391.

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Investigation on mc-Si Passivation Using Direct-PECVD a-SiOx:H/a-SiNx:H Stack System

WANG Zhen-jiao;JI Jing-jia;SHI Zheng-rong;LI Guo-hua   

  • Online:2009-04-15 Published:2021-01-20

CLC Number: