Numerical Analysis of Substrate Temperature Field and Gas Spacial Field in Hot Filament CVD System

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JOURNAL OF SYNTHETIC CRYSTALS ›› 2009, Vol. 38 ›› Issue (2): 434-439.

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Numerical Analysis of Substrate Temperature Field and Gas Spacial Field in Hot Filament CVD System

YANG Chun;LU Wen-zhuang;ZUO Dun-wen;XU Feng;REN Wei-tao

Online:2009-04-15 Published:2021-01-20

Abstract

CLC Number:

TB43

YANG Chun;LU Wen-zhuang;ZUO Dun-wen;XU Feng;REN Wei-tao. Numerical Analysis of Substrate Temperature Field and Gas Spacial Field in Hot Filament CVD System[J]. Journal of Synthetic Crystals, 2009, 38(2): 434-439.

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Numerical Analysis of Substrate Temperature Field and Gas Spacial Field in Hot Filament CVD System

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