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JOURNAL OF SYNTHETIC CRYSTALS ›› 2009, Vol. 38 ›› Issue (3): 556-560.
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YU Jun;WANG Xiao-jing;LEI Qing-song;PENG gang;XU Wei
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RSSOnline:2009-06-15
Published:2021-01-20
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YU Jun;WANG Xiao-jing;LEI Qing-song;PENG gang;XU Wei. Effects of Deposition Pressure on Nanocrystalline Silicon Thin Film by Magnetron Sputtering[J]. Journal of Synthetic Crystals, 2009, 38(3): 556-560.
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