Study on Effect of Doping Content on the Performance of ZnO Ceramic Target

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JOURNAL OF SYNTHETIC CRYSTALS ›› 2009, Vol. 38 ›› Issue (3): 772-776.

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Study on Effect of Doping Content on the Performance of ZnO Ceramic Target

ZHAO Jing;LIU Li-jie;CAI Ning;XUE Jun-ming;ZHAO Ying

Online:2009-06-15 Published:2021-01-20

Abstract

CLC Number:

TM615

ZHAO Jing;LIU Li-jie;CAI Ning;XUE Jun-ming;ZHAO Ying. Study on Effect of Doping Content on the Performance of ZnO Ceramic Target[J]. Journal of Synthetic Crystals, 2009, 38(3): 772-776.

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Study on Effect of Doping Content on the Performance of ZnO Ceramic Target

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